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Sulfur Hexafluoride (SF6)
It is a colorless, tasteless, odorless, non-toxic, non- burning gas with very good stability, heat resistance, excellent electrical insulation and arcing characteristics.
With excellent electric in sulating and arc-quenching capacity,SF6 has been widely used in the fields of power installations,laser,medicine,meteorology,refrigeration,fire-fighting,chemical-industry,military engineering,aerospace,nonferrous metallurgy and physical research etc.
Electronic SF6 is widely used in TFT-LCD,semiconductor and solar photoelectricity industy ect.
It is a good cleaning gas and etching gas for plasma process.
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PURITY 99.99% 99.999%
Nitrogen < 20 ppm < 5 ppm
Oxygen < 10 ppm < 3 ppm
Total Hydrocarbons (as CH4) < 5 ppm < 1 ppm
Halocaron 14 < 60 ppm < 5 ppm
Water < 5 ppm < 3 ppm
Hydrogen Fluoride < 0.1 ppm < 0.1 ppm
Valve Material Brass Brass
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Molecular Weight: 146.05
Specific Volume: 2.65 cf/lb @NTP
Boiling Point: -82.7 °F@ 1 Atm
CAS No.: 2551-62-4
Hazards: Suffocation
Safety Data:
ACGIH - TLV: 1,000 ppm
Vapor Pressure Data:
Temp, Deg.F Pressure,psia
32 184.4
70 320
Main use:
(1)Extensively Be applied to high pressure and win the lnsulation material of piezoelectric machine equipment and reduce arc dielectric;
(2)BE more available than metal smelting production technical to defend oxideizing agent;
(3)Used for a weather to show a Zong experiment and show a Zong agent, make air - cooling technical system air - cooling the agent and thermal carry a body;
(4)Used for X on the medical treatment-shoot the insulated gas of wire device;
(5)It is more available than single crystal Huo of production and foundation theory science search etc..
Sulfur Hexafluoride (SF6)