Mono wafer(156mm× 56mm) Dimension   156± 0.5mm Diameter   200± 0.5mm Thickness   200± 20μm Resistivity   1-3Ω. Cm Life Time   ≥ 10μs Oxygen Concentration  ≤ 1× 1018atoms/cm3 Carbon Concentration  ≤ 5χ 1016atoms/cm3 Warpage&Bow   ≤ 75μm TTV   ≤ 40μm Saw Marks   Depth ≤ 10μm