... films,Dielectric films,Compound films,Reaction films,Muti-layer function filmsPower sourceElectric arc power supply,DC ... gas controlQuality flowmeter + electromagnetism ceramic valveVacuum chamber structureVertical single(side) door, pump system postposition, double water-coolingVacuum ... display composite vacuum gauge: from atmosphere to 1.0*10-5PaControl modeFull automation control system PC ...