... table 200 mm 200 mm 200 mm Travel (x, y, z) 2200×1000×750 mm 2700×1700×850 mm 3200×2000 ... mm/min 15000 mm/min 15000 mm/min Rapid speed (z) 15000 mm/min 10000 mm/min 10000 mm/min Positioning ... accuracy (x, y, z) X:0.02 Y:0.018 Z:0.015 mm X:0.02 Y ... 014 mm Repeat positioning accuracy (x,y,z) X:0.01 Y:0.009 Z:0.008 mm X:0.014 Y:0 ... .013 Z:0.012 mm X:0.015 ...