... a rough and medium vacuum,also as backing pumps in pump combinations with Roots pumps, diffusion pumps , molecular pumps ... m3/h) allows every customer to select the right pump for his particular needs.APPLICATIONSemiconductor, solar industry,Vacuum coating, ... labs,freeze drying systems,backing pump for high vacuum pump systems. ADVANTAGESHigh ultimate vacuumBuilt-in oil pump ,good pressure lubrication . ...