... surface geometrymeasuring instrument which comprises the surface roughness,primary profile andform measuring systems.It is particularly suitable for analysis ... ,R3y,R3z, NR1, NR2,tp (8) Graph analysis: profile--NR, profile--tp curve, amplitude distribution--tp curve, tp curve and data ... -90°angle with spherical tip 5μm radius 11. Primary profile measuring system: (1) Measuring range: 16μm/160μm (2) ...