... workpiece tray,planetary,revolution-autorotation, satisfy customers’demand of productivity,rotate 5 to 30 r/min,Continuously Variable ... 1 to 99 layerautomation coating process,99 kinds of data,is of high precisionOptical film thickness control meter:adopted ... film layer through the curve analysis of 370 to 870mm transmissivity (or reflectivity) of monitoring chips,can achieve high control precision