... uniformity: 1200±5°C, 5zones (front, middle, back, uppler, lower) Heating power: 3 Phase, 50Hz±0.05% 300kVA; Heater type: Graphite5 ... /13Pa Temperature uniformity: 1120±7°C; Heater type: Graphite Heating power: 3 Phase, 50Hz 300kVA4 Slow cooling chamber: Ultimate/Operating ... uniformity: 600±5°C; 9zones (upper, middle, lower×front, middle, back) 3 Heating chamber: Max/Operating temperature: 700°C/600°C ...