... film reflective film filter film beam-splitting film color film Feature:1 Equipped with E-beam gun,thermal evaporator source,ion ... 2 Kinds of dielectric film:antireflection film,filter film,beam-splitting film,color film3 Deposited protective film:rigid ... spiral scanning,orthogonal scanning,sine wave, focusing capability of beam spot is good,positioning accuracy is high, good reproducibility2 ...