... horizontal); 3) Resolution(vertical):0.25μm/4mm,1.25μm/20mm; 4) Resolution(horizontal):1μm; 5) Measuring parameter:vertical/horizontal ... 88°(down). 10. Surface roughness measuring system: (1) Measuring range: 16 /160 μm (2) Indication error: ≤±5% (3) Smallest resolution: 0.001 ... 11. Primary profile measuring system: (1) Measuring range: 16μm/160μm (2) Measuring parameter: Pa, Pp, Pv, Pz, Pq, Pt, Psk, ...