1.Ultra compact 2.Long lifetime 3.Low cost 4.Easy ... stability (rms, over 4 hours)<5%, <3%, 1%Noise of amplitude(rms,1~20MHz)<0.2%Warm-up time (minutes)<5Beam divergence, full ... angle (mrad)~1.0Beam diameter at the aperture (mm)3.0×5.0, elliptical Polarization ratio>100:1Beam height ... Low noise UV laser system at 375nm / MLL-III-375 / 1~150mW