... 1,1,1,3,3,3-Hexamethyldisilazane Alias: HMDS; Hexamethyldisilazan Product identificationChemical name: 1,1,1,3,3,3-Hexamethyldisilazane Alias: HMDS; HexamethyldisilazaneCAS: 999-97-3EINECS: 213-668-5 ... Molecular structure : Molecular formula: C6H19NSi2Molecular weight: 161.39Product features Density(25°C,g/cm3)0.774Refractive index (20°C)1.4069-1 ... transported as dangerous goods.3. This product is ...