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AZO rotatable sputtering target
Sputtering target made by Balen have following characteristics:
the purity is more than 99.99% ,
the relative density is more than 99%.
The size is as following:
The plate sputtering target:
all size within 600*300mm*20mm
The cylinder sputtering target:
the diameter:60-400mm
the thickness:5-15mm
the height:50-200mm.
AZO rotatable sputtering target