Basic functions

1.Make accurate positioning of the graphite boat.

2.In the graphite boat can tilt 15 degrees or rotated 180 degrees.

3. Been purified air through medium air filter and HEPA filter into the machine ,the time be required to circulating blow.

Technical Requirements

1. The cooling room is made of stainless steel to ensure the equipment.

2. Two blowers,air flow1000m3/h.

3. With medium air filter and HEPA filter.

4. In order to achieve energy-saving effect, self-control devices must be installed. When the graphite boat into the loading room to start automatically,,cooling to the required time, or leave the room can automatically stop.

5. In order to prevent the graphite boat moving after impact, shock to the foot used to install expansion screw feet.

Solar industry PECVD graphite boat loading room