Gas Name
Chemical Formula
Specification(%)
Impurity (ppm)
Argon
Ar
99.99
O2≤10 THC≤10 N2≤50 H2≤5 H2O≤15
99.999
O2≤2 THC≤2 N2≤5 H2≤1 H2O≤4
99.9995
O2≤1 THC≤0.5 N2≤2 H2≤0.5 H2O≤1
Argon gas