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We know Ion pumps are slectro-physical vacuum pumps and remove gases from their environment by turning tehm into solid materials- Titanium, Tantalum, Niobium, Molybdenum,etc. These materials and geometry of the cathode and anode impact speed and stability of a Ion pumps. A 100% Titanium Anode or and Cathode can achieve the highest reactive gas pumping speed of any ion pump element.
Ti Anode Cathode