Ion Sputtering Coater

Function: Coating samples with gold or platinum.

Specifications:

Glass Processing Room: Diameter:Φ100mm

Height: 130mm

Sample bench size: Φ40mm

Released at the same time 6 sample cups.

Vacuum system: Direct Rotary Vane Vacuum Pump 2L/S.

Vacuum testing: Pirani gauge

Vacuum protection: 20Pa,With the work of micro-pneumatic valve vacuum adjustment.

Processing Room Media Gas: Air or argon,Equipped with argon inlet and a dedicated micro-pneumatic regulator.

Gold target: Φ58mm,1 Piece.

Ion Sputtering Coater