1. for the CVD/CVI treatment of porous material (C/C materials) Introduction The equipment is mainly used for the CVD/CVI treatment of porous material (C/C materials). ComposingThe equipment is composed of furnace chamber, thermal insulation system, deposition gas system, vacuum system, tar collecting system, water system, job loading-and-unloading trolley and electrical control system. It is vertical and bottom job loading.  Main Specification and Accessories  

Specification	ZHC-Φ22/30
Working Zone Dimension	Φ220×H300
Rated Temperature	1350°C
Temperature Uniformity	≤±5°C
Rated Heating Power	35kw
Voltage	Three Phase,380±10%
Maximum Vacuum Degree Without Loading	≤5Pa
Vacuum Increase Rate	≤2Pa/h

Vertical Vacuum CVD/CVI heat treatment Furnace