... ,Tantalum alloy target Material: RO5200, RO5400, RO5252(Ta-2.5W), RO5255(Ta-10W) Size: Tantalum sputtering target,Tantalum alloy targetMaterial: RO5200 ... , RO5400, RO5252(Ta-2.5W), RO5255(Ta-10W) Size:circular targets: Diameter 25mm up to 400mm ... .99%Table 1: technology parameterGrade3N, 3N5, 4N, with Ta 99.99%min Recrystallization 95%min Grain sizeASTM 4 or ...